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Volumn 81, Issue 4, 2006, Pages 459-465

Compound two-dimensional thermo-elastic and thermodynamic analysis for c-axis-oriented epitaxial lead titanate thin films

Author keywords

Curie temperature; Ferroelectric MEMS; Piezoelectric properties; PT films; Thermo elastic; Thermodynamic

Indexed keywords

EPITAXIAL GROWTH; LATTICE CONSTANTS; PIEZOELECTRICITY; SUBSTRATES; THERMAL STRESS; THERMODYNAMIC PROPERTIES; THERMOELASTICITY; TITANIUM COMPOUNDS;

CURIE TEMPERATURE; FERROELECTRIC MEMS; PT FILMS; TEMPERATURE VARIATION;

THIN FILMS;

EID: 33750061928 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2006.06.016 Document Type: Article

Times cited : (3)

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