Study on ZnO thin films deposited on sol-gel grown ZnO buffer by RF magnetron sputtering

Vacuum

Volumn 81, Issue 4, 2006, Pages 502-506

  Xingwen, Zhu ^a   Yongqiang, Li ^a   Ye, Lu ^a   Yingwei, Li ^a   Yiben, Xia ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

Buffer layer; C orientation; RF magnetron sputtering; X ray diffraction; Zinc compounds

Indexed keywords

ANNEALING; CRYSTAL GROWTH; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; SOL-GELS; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ANNEALING TEMPERATURE; BUFFER LAYERS; GLASS SUBSTRATES; MICROSTRUCTURE QUALITY;

THIN FILMS;

EID: 33750052276     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.07.008     Document Type: Article

References (20)

1. Sun X.W., and Kwok H.S. J Appl Phys 86 (1999) 408
2. Kim S.W., Fujita S., and Fujita S. Appl Phys Lett 81 (2002) 5036
3. Makino T., Chia C.H., Tuan N.T., Segawa Y., Kawasaki M., Ohtomo A., et al. Appl Phys Lett 76 (2000) 3549
4. Srikant V., and Clarke D.R. J Appl Phys 83 (1998) 5447
5. Shan F.K., Kim B.I., Liu G.X., Liu Z.F., Sohn J.Y., Lee W.J., et al. J Appl Phys 95 (2004) 4772
6. Hong R.J., Qi H.J., Huang J.B., He H.B., Fan Z.X., and Shao J.D. Thin Solid Films 473 (2005) 58
7. Ye Z.Z., Lu J.G., Chen H.H., Zhang Y.Z., Wang L., Zhao B.H., et al. J Cryst Growth 253 (2003) 258
8. Tsukazaki A., Ohtomo A., Kawasaki M., Makino T., Chia C.H., Segawa Y., et al. Appl Phys Lett 84 (2004) 3858
9. Cui Y.G., Du G.T., Zhang Y.T., Zhu H.C., and Zhang B.L. J Cryst Growth 282 (2005) 389
10. Zhai J.W., Zhang L.Y., and Xi Y. Ceram Int 26 (2000) 883
11. Xue Z.Y., Zhang D.H., Wang Q.P., and Wang J.H. Appl Surf Sci 195 (2002) 126
12. Li B.S., Liu Y.C., Zhi Z.Z., Shen D.Z., Lu Y.M., Zhang J.Y., et al. Thin Solid Films 414 (2002) 170
13. Toshiyuki N., Yasusei Y., Takeshi K., Hideki M., and Hachizo M. Thin Solid Films 411 (2002) 60
14. Sato D., Kashiwaba Y., Haga K., Watanabe H., Zhang B.P., and Segawa Y. Vacuum 74 (2004) 601
15. Chen S.J., Liu Y.C., Ma J.G., Lu Y.M., Zhang J.Y., Shen D.Z., et al. J Cryst Growth 254 (2003) 86
16. Kim I.W., Kim H.S., Kwon Y.B., Doh S.J., Kim C.C., Jung H.J., et al. Appl Surf Sci 241 (2005) 261
17. Jeong S.-H., Kim I.-S., Kim J.-K., and Lee B.-T. J Cryst Growth 264 (2004) 327
18. Jung Y.S., Kononenko O., Kim J.S., and Choi W.K. J Cryst Growth 274 (2005) 418
19. Liu L.C., Zhu X.W., and Lu Y. Electron Components Mater 24 (2005) 30
20. Kim K.-S., Kim H.W., and Lee C.M. Mater Sci Eng B 98 (2003) 135