Arbitrary surface structuring of amorphous silicon films based on femtosecond-laser-induced crystallization

Applied Physics Letters

Volumn 89, Issue 15, 2006, Pages

  Lee, Geon Joon ^a   Song, Seok Ho ^c   Lee, YoungPak ^c   Cheong, Hyeonsik ^a   Yoon, Chong Seung ^a   Son, Yong Duck ^b   Jang, Jin ^b  

^a Hanyang University   (South Korea)

^b Kyung Hee University   (South Korea)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

FEMTOSECOND-LASER PULSES; SILICON FILMS; SURFACE STRUCTURING;

AMORPHOUS SILICON; COMPUTER GENERATED HOLOGRAPHY; CRYSTALLIZATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LASER APPLICATIONS; LASER PULSES;

THIN FILMS;

EID: 33750006293     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358922     Document Type: Article

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