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Volumn 3334, Issue , 1998, Pages 940-950
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New distortion metrology using reticle coordinate error
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Author keywords
Distortion; Metrology; Reticle
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Indexed keywords
ERRORS;
EXPOSURE METERS;
MEASUREMENT ERRORS;
OPTICAL INSTRUMENTS;
DISTORTION;
DISTORTION MEASUREMENTS;
ERROR MEASUREMENTS;
EXPOSURE TOOLS;
MEASUREMENT RESULTS;
METROLOGY;
RETICLE;
MEASUREMENTS;
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EID: 33749881471
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.310723 Document Type: Conference Paper |
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Times cited : (1)
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References (0)
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