Development of a silane coupling agent containing active ester linked by photodegradable group

Polymer Preprints, Japan

Volumn 55, Issue 1, 2006, Pages 1646-

  Yamaguchi, Kazuo ^a   Nakayama, Hidekazu ^a  

^a KANAGAWA UNIVERSITY   (Japan)

Author keywords

Photodegradable group; Photolithography; Self assembled monolayer; Silane coupling agent; Succinimidyl ester

Indexed keywords

PHOTODEGRADABLE GROUP; SILANE COUPLING AGENTS; SUCCINIMIDYL ESTERS;

ESTERS; MASKS; PHOTODEGRADATION; PHOTOLITHOGRAPHY; SELF ASSEMBLY;

SILANES;

EID: 33749862128     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)