Maximum likelihood estimation as a general method of combining sub-aperture data for interferometric testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6342 II, Issue , 2006, Pages

  Su, Peng ^a   Burge, Jim ^a   Sprowl, Robert A ^a   Sasian, Jose ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

Absolute surface shape metrology; Interferometry; Maximum likelihood estimation; Modulated sub aperture interferometric testing; Optical testing; Sub aperture testing

Indexed keywords

ABSOLUTE SURFACE SHAPE METROLOGY; MODULATED SUB-APERTURE INTERFEROMETRIC TESTING; SUB-APERTURE TESTING;

INTERFEROMETRY; MAXIMUM LIKELIHOOD ESTIMATION; MIRRORS; MODULATION;

OPTICAL DESIGN;

EID: 33749852728     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.692233     Document Type: Conference Paper

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