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Volumn 788, Issue , 2005, Pages 245-248
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Determination of ultra-shallow junction (USJ) quality with an elastic material probe (EM-probe)
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Author keywords
Leakage; SDE; USJ
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Indexed keywords
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EID: 33749671885
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.2062970 Document Type: Conference Paper |
Times cited : (2)
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References (12)
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