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Volumn 788, Issue , 2005, Pages 245-248

Determination of ultra-shallow junction (USJ) quality with an elastic material probe (EM-probe)

Author keywords

Leakage; SDE; USJ

Indexed keywords


EID: 33749671885     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2062970     Document Type: Conference Paper
Times cited : (2)

References (12)
  • 1
    • 33749652203 scopus 로고    scopus 로고
    • 45nm CMOS technology
    • EEE
    • 45nm CMOS Technology, IEDM 2004 Short Course, EEE 2004.
    • (2004) IEDM 2004 Short Course
  • 5
    • 33644496035 scopus 로고    scopus 로고
    • Silicon Front-End Junction Formation - Physics and Technology, edited by P. Pichler, A. Claverie, R. Lindsay, M. Orlowski, and W. Windl, Warrendale, PA
    • Hillard, R.J., Mazur, R.G., Alexander, W. J., Ye, C. W., Benjamin, M.C., and Borland, J.O. in Silicon Front-End Junction Formation - Physics and Technology, edited by P. Pichler, A. Claverie, R. Lindsay, M. Orlowski, and W. Windl, Mater. Res. Soc. Symp. Proc. Vol. 810, Warrendale, PA, 2004, C11.6
    • (2004) Mater. Res. Soc. Symp. Proc. , vol.810
    • Hillard, R.J.1    Mazur, R.G.2    Alexander, W.J.3    Ye, C.W.4    Benjamin, M.C.5    Borland, J.O.6
  • 9
    • 33749671224 scopus 로고    scopus 로고
    • Accurate determination of ultra-shallow layer sheet resistance with a non-penetrating four point probe
    • R. Hillard, "Accurate Determination of Ultra-shallow Layer Sheet resistance with a Non-penetrating Four Point Probe", Semicon-West 2004 Workshop on USJ Characterization.
    • Semicon-West 2004 Workshop on USJ Characterization
    • Hillard, R.1
  • 11
    • 33644487130 scopus 로고    scopus 로고
    • Characterization and metrology for ULSI technology
    • Hillard, R. J. et. al, Characterization and Metrology for ULSI Technology, AIP Conference proceedings 683, 2003, p. 802.
    • (2003) AIP Conference Proceedings , vol.683 , pp. 802
    • Hillard, R.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.