An integrated MEMS ferrofluid pump using insulated metal substrate

IECON Proceedings (Industrial Electronics Conference)

Volumn 2005, Issue , 2005, Pages 2372-2375

  Mao, Leidong ^a   Koser, Hur ^a  

^a Yale University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FERROFLUID MICROPUMPS; METAL SUBSTRATES; PUMPING CHARACTERISTICS;

COST EFFECTIVENESS; INSULATING MATERIALS; MAGNETIC FLUIDS; NUMERICAL ANALYSIS; SUBSTRATES;

MICROELECTROMECHANICAL DEVICES;

EID: 33749669986     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IECON.2005.1569275     Document Type: Conference Paper

References (11)

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