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Volumn 6275, Issue , 2006, Pages
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Progress on background-limited membrane-isolated TES bolometers for far-IR/submillimeter spectroscopy
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Author keywords
Far IR spectrometer; Si3n4 thermal transport; Submillimeter spectrometer; Transition edge sensor
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Indexed keywords
FAR-IR SPECTROMETER;
SI3N4 THERMAL TRANSPORT;
SUBMILLIMETER SPECTROMETERS;
TRANSITION EDGE SENSORS;
INFRARED SPECTROSCOPY;
OPTICAL SENSORS;
PHONONS;
SPECTROMETERS;
THERMAL CONDUCTIVITY;
THERMOMETERS;
BOLOMETERS;
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EID: 33749608177
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.672036 Document Type: Conference Paper |
Times cited : (34)
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References (9)
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