Detection of copper and water in low-k dielectrics by triangular voltage sweep measurements

Materials Research Society Symposium Proceedings

Volumn 914, Issue , 2006, Pages 375-380

  Ciofi, Ivan ^a   Tökei, Zsolt ^a   Saglimbeni, Marco ^a   Van Hove, Marleen ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; COPPER; CORRELATION METHODS; MIS DEVICES; PLASMA APPLICATIONS; VOLTAGE MEASUREMENT;

LOW-K DIELECTRICS; PLANAR CAPACITORS; TIME DEPENDENT DIELECTRIC BREAKDOWN (TDDB); TRIANGULAR VOLTAGE SWEEP (TVS) ];

DIELECTRIC FILMS;

EID: 33749605488     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0914-f02-02     Document Type: Conference Paper

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