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Volumn 27, Issue 18, 2006, Pages 1590-1595

Novel anionic photoacid generators (PAGs) and corresponding PAG bound polymers

Author keywords

Anionic PAG; Calorimetry; EUV lithography; Photoacid generator (PAG); Polymer resist

Indexed keywords

ANIONIC PAG; EUV LITHOGRAPHYEUV LITHOGRAPHY; PHOTOACID GENERATORS (PAG); POLYMER RESISTS;

CALORIMETRY; DIFFUSION; ELECTRON BEAM LITHOGRAPHY; POLYMER BLENDS; SUBSTITUTION REACTIONS; THERMODYNAMIC STABILITY;

NEGATIVE IONS;

EID: 33749564137 PISSN: 10221336 EISSN: 15213927 Source Type: Journal
DOI: 10.1002/marc.200600330 Document Type: Article

Times cited : (27)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.