Monte Carlo model of the temperature rise at a GaAs surface under an electron beam

Surface and Interface Analysis

Volumn 38, Issue 7, 2006, Pages 1153-1157

  Nouiri, A ^a   Chaguetmi, S ^a   Belabed, N ^a  

^a Universite Mentouri Constantine   (Algeria)

Author keywords

Electron beam; Monte Carlo; SEM; Temperature rise

Indexed keywords

ELECTRON BEAM HEATING; ELECTRON ENERGY; TEMPERATURE RISE;

ELECTRON BEAMS; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SURFACE TREATMENT; TEMPERATURE DISTRIBUTION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 33749548529     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2372     Document Type: Article

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