Model updating and optimum designs for V-shaped atomic force microscope probes

Engineering Optimization

Volumn 38, Issue 7, 2006, Pages 755-770

  Chen, Kun Nan ^a  

^a TUNG NAN INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Atomic force microscope; Contact stiffness; Modal sensitivity; Model updating; Shape optimization; V shaped probe

Indexed keywords

CONTACT STIFFNESS; MODAL SENSITIVITY; MODEL UPDATING; SHAPE OPTIMIZATION; V-SHAPED PROBE;

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; MATHEMATICAL MODELS; MODAL ANALYSIS; OPTIMIZATION; SURFACE TREATMENT;

MACHINE DESIGN;

EID: 33749458683     PISSN: 0305215X     EISSN: 10290273     Source Type: Journal    
DOI: 10.1080/03052150600704534     Document Type: Article

References (24)

1. Automation Creations Inc. MatWeb: Material property data. Available online at: http://www.matweb.com (accessed 20 January 2006).
2. Binnig, G., Quate, C.F. and Gerber, C., Atomic force microscope. Phys. Rev. Lett., 1986, 56(9), 930-933.
3. Chang, W., Sensitivity of vibration modes of atomic force microscope cantilevers in continuous surface contact. Nanotechnology, 2002, 13, 510-514.
4. Chen, K.-N., Gau, W.-H. and Hu, Y.-C., Identification of material and geometrical parameters for microstructures by dynamic finite element model updating. Microsyst. Technol., 2006, 12(8), 736-745.
5. Friswell, M.I. and Mottershead, J.E., Finite Element Model Updating in Structural Dynamics, 1995 (Kluwer Academic: Dordrecht).
6. Gendron, G., A review of four PC packages for FE structural analysis. Finite Eiern. Anal. Des., 1997, 28, 105-114.
7. Harnagea, C., Alexe, M. and Hesse, D., Contact resonances in voltage-modulated force microscopy. Appl. Phys. Lett., 2003, 83(2), 338-340.
8. Johnson, K.L., Contact Mechanics, 1985 (Cambridge University Press: Cambridge).
9. Kim, G.H. and Park, Y.S., An improved updating parameter selection method and finite element model update using multiobjective optimisation technique. Mech. Syst. Signal Process., 2004, 18, 59-78.
10. Kirsch, U., Structural Optimization: Fundamentals and Applications, 1993 (Springer-Verlag: Berlin).
11. Meirovitch, L., Analytical Methods in Vibrations, 1967 (Macmillan: New York).
12. More, J.J. and Wright, S.J., Optimization Software Guide, 1993 (SIAM: Philadelphia, PA).
13. Mottershead, J.E., Mares, C., Friswell, M.I. and James, S., Selection and updating of parameters for an aluminum space-frame model. Mech. Syst. Signal Process., 2000, 14(6), 923-944.
14. Muraoka, M., Sensitive detection of local elasticity by oscillating an AFM cantilever with its mass concentrated. JSME Int. J. Ser. A, 2002, 45(4), 567-572.
15. Pedersen, N.L., Design of cantilever probes for atomic force microscopy (AFM). Engng. Optimiz., 2000, 32, 373-392.
16. Rabe, U., Amelio, S., Rester, E., Scherer, V., Hirsekorn, S. and Arnold, W., Quantitative determination of contact stiffness using atomic force acoustic microscopy. Ultrasonics, 2000, 38, 430-437.
17. Sader, J.E., Larson, I., Mulvaney, P. and White, L.R., Method for the calibration of atomic force microscope cantilevers. Rev. Sci. Instrum., 1995, 66(7), 3789-3798.
18. Sinha, J.K. and Friswell, M.I., Model updating: a tool for reliable modeling, design modification and diagnosis. Shock Vibr. Digest, 2002, 34(1), 27-35.
19. Stark, R.W., Drobek, T. and Heckl, W.M., Thermomechanical noise of a free V-shaped cantilever for atomic-force microscopy. Ultramicroscopy, 2001, 86, 207-215.
20. Tsou, C., Yin, H. and Fang, W., On the out-of-plane deformation of V-shaped micromachined beams. J. Micromech. Micweng., 2001, 11, 153-160.
21. Turner, J.A. and Wiehn, J.S., Sensitivity of flexural and torsional vibration modes of atomic force microscope cantilevers to surface stiffness variations. Nanotechnology, 2001, 12, 322-330.
22. Turner, J. A., Hirsekorn, S., Rabe, U. and Arnold, W., High-frequency response of atomic-force microscope cantilevers. J. Appl. Phys., 1997, 82(3), 966-979.
23. Yamanaka, K. and Nakano, S., Quantitative elasticity evaluation by contact resonance in an atomic force microscope. Appl. Phys. A, 1998, 66, S313-S317.
24. Yaralioglu, G.G., Degertekin, F.L., Crozier, K.B. and Quate, C.F., Contact stiffness of layered materials for ultrasonic atomic force microscopy. J. Appl. Phys., 2000, 87(10), 7491-7496.