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Journal of Materials Science: Materials in Electronics

Volumn 17, Issue 12, 2006, Pages 973-977

The influence of substrate temperature on the properties of aluminum-doped zinc oxide thin films deposited by DC magnetron sputtering

(3) Moon, Yeon Keon a Kim, Se Hyun a Park, Jong Wan a

a Hanyang University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLOGRAPHY; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SUBSTRATES; THERMAL EFFECTS;

ALUMINUM-DOPED ZINC OXIDE THIN FILMS; DC MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE;

THIN FILMS;

EID: 33749383695 PISSN: 09574522 EISSN: 1573482X Source Type: Journal
DOI: 10.1007/s10854-006-9039-x Document Type: Article

Times cited : (25)

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