Technique for thermal isolation of antenna-coupled infrared microbolometers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 5, 2006, Pages 2356-2359

  Middleton, C F ^a   Boreman, G D ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA-COUPLED INFRARED MICROBOLOMETERS; SQUARE SPIRAL ANTENNAS; THERMAL ISOLATION;

ANTENNAS; NICKEL; SILICA; THERMAL EFFECTS;

INFRARED DEVICES;

EID: 33749349849     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2335434     Document Type: Article

References (4)

1. P. W. Kruse and D. D. Skatrud, Uncooled Infrared Imaging Arrays and Systems (Academic, San Diego, 1997).
2. F. J. Gonzalez and G. D. Boreman, Infrared Phys. Technol. 46, 418 (2005).
3. F. Wooten, Optical Properties of Solids (Academic, New York, 1972).
4. F. J. Gonzalez, B. Ilic, J. Alda, and G. D. Boreman, IEEE J. Sel. Top. Quantum Electron. 11, 117 (2005).