Dynamic atomic force microscopy operation based on high flexure modes of the cantilever

Review of Scientific Instruments

Volumn 77, Issue 9, 2006, Pages

  Girard, P ^a   Ramonda, M ^b   Arinero, R ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

^b UNIV MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; IMAGING SYSTEMS; OSCILLATIONS; SENSORS; STABILIZATION; VACUUM APPLICATIONS;

AMPLITUDE CONTROLLED CONDITIONS; HIGH FLEXURE MODES; OSCILLATING SENSORS; STABILIZATION TIME THRESHOLD;

CANTILEVER BEAMS;

EID: 33749340416     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2348634     Document Type: Article

References (28)

1. Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987).
2. Q. Zhiong, D. Imniss, K. Kjoller, and V. B. Eilings, Surf. Sci. 290, L188 (1993).
3. K. Unenuma, H. Harakawa, and A. Ikai, Jpn. J. Appl. Phys., Part 2 32, L1711 (1993).
4. J. Tamayo and R. Garcia, Langmuir 12, 4430 (1996).
5. J. P. Cleveland, B. Anczykowski, A. E. Schmid, and V. B. Eilings, Appl. Phys. Lett. 72, 2613 (1998).
6. T. Albrecht, P. Grutter, D. Horne, and D. Rugar, J. Appl. Phys. 69, 668 (1991).
7. F. J. Giessibl, Rev. Mod. Phys. 75, 949 (2003).
8. J. Mertz, O. Marti, and J. Mlynek, Appl. Phys. Lett. 62, 2344 (1993).
9. K. J. Bruland, J. L. Garbini, M. Dougherty, and J. A. Slides, J. Appl. Phys. 83, 668 (1998).
10. T. R. Rodriguez and R. Garcia, Appl. Phys. Lett. 82, 4821 (2003).
11. T. Sulchek et al., Appl. Phys. Lett. 76, 1473 (2000).
12. R. W. Stark and W. M. Heckl, Surf. Sci. 457, 219 (2000).
13. E. Volterra and E. C. Zachmanoglou, Dynamics of Vibrations (Merrill, Columbus, OH, 1965).
14. Standard AFM sensors and typical stiffness are indicated; from Nanosensors: EFM (3 N/m) and FM (3 N/m) and from Veeco: LTESP (48 N/m), RTESP (40 N/m), and MPP (3 N/m).
15. Test grid TGZ 02 from Veeco.
16. A. Volodin and C. Van Haesendonck, Appl. Phys. A: Mater. Sci. Process. 66, S305 (1998).
17. F. R. Blom, S. Brouwstra, M. Elwenspoek, and J. H. J. Fluitman, J. Vac. Sci. Technol. B 10, 19 (1992).
18. S. Evoy, A. Olkhovets, L. Sekaric, J. M. Parpia, H. G. Craighead, and D. W. Carr, Appl. Phys. Lett. 77, 2397 (2000).
19. O. Pfeiffer et al., Appl. Surf. Sci. 157, 337 (2000).
20. S. Rast, C. Wattinger, U. Gysin, and E. Meyer, Rev. Sci. Instrum. 71, 2772 (2000).
21. K. L. Ekinci and M. L. Roukes, Rev. Sci. Instrum. 76, 061101 (2005).
22. C. Zener, Phys. Rev. 52, 230 (1938);
23. C. Zener, Phys. Rev. 53, 90 (1938);
24. C. Zener, W. Otis, and R. Nuckolls, Phys. Rev. ibid. 53, 100 (1938).
25. S. Kitamura and M. Iwatsuki, Jpn. J. Appl. Phys., Part 2 35, L668 (1996).
26. Y. Liang, D. A. Bonnel, W. D. Goodhue, D. D. Rathman, and C. O. Bolzer, Appl. Phys. Lett. 66, 1147 (1995).
27. P. Girard, M. Ramonda, and D. Saluel, J. Vac. Sci. Technol. B 20, 1348 (2002).
28. The physical considerations underlying this result will be developed in another paper.