Loss of phosphorous in silica-phosphate sol-gel films

Journal of Sol-Gel Science and Technology

Volumn 40, Issue 2-3, 2006, Pages 325-333

  Anastasescu, M ^a   Gartner, Mariuca ^a   Ghita, A ^a   Predoana, Luminita ^a   Todan, Ligia ^a   Zaharescu, Maria ^a   Vasiliu, Cristina ^b   Grigorescu, Cristiana ^b   Negrila, C ^c  

^a INSTITUTE OF PHYSICAL CHEMISTRY   (Romania)

^b NATIONAL INSTITUTE FOR OPTOELECTRONICS   (Romania)

^c NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

Ellipsometry; Phosphorous loss; Phosphosilicate films; Sol gel

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; ELLIPSOMETRY; PHOSPHATES; PHOSPHORIC ACID; SILICA; SOL-GELS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALKOXIDE; MOLAR COMPOSITION; PHOSPHOROUS LOSS; PHOSPHOSILICATE FILMS;

PHOSPHORUS;

EID: 33749339961     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-006-8775-y     Document Type: Conference Paper

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