Extraction of Cu diffusivities in dielectric materials by numerical calculation and capacitance-voltage measurement

Journal of Applied Physics

Volumn 100, Issue 6, 2006, Pages

  Kim, Ki Su ^a   Joo, Young Chang ^a   Kim, Ki Bum ^a   Kwon, Jang Yeon ^b  

^a Seoul National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; DIELECTRIC MATERIALS; DIFFUSION; ELECTRIC FIELDS; FINITE DIFFERENCE METHOD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

BIAS TEMPERATURE STRESSING (BTS); CAPACITANCE VOLTAGE MEASUREMENT; DIFFUSIVITIES; SOLID SOLUBILITY;

COPPER;

EID: 33749325777     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2353891     Document Type: Article

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