N-type CVD diamond doped with phosphorus using the MOCVD technology for dopant incorporation

Physica Status Solidi (A) Applications and Materials Science

Volumn 203, Issue 12, 2006, Pages 3136-3141

  Kociniewski, T ^a   Barjon, J ^a   Pinault, M A ^a   Jomard, F ^a   Lusson, A ^a   Ballutaud, D ^a   Gorochov, O ^a   Laroche, J M ^a   Rzepka, E ^a   Chevallier, J ^a   Saguy, C ^b  

^a Centre National de la Recherche Scientifique   (France)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

N-TYPE DIAMONDS; PHOSPHINE GAS; TBP PRECURSOR;

METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANIC COMPOUNDS; PHOSPHORUS; SEMICONDUCTOR DOPING;

DIAMOND LIKE CARBON FILMS;

EID: 33749325362     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200671113     Document Type: Conference Paper

References (14)

1. S. Koizumi, M. Kamo, Y. Sato, H. Ozaki, and T. Inuzuka, Appl. Phys. Lett. 71, 1065 (1997).
2. M. Nesladek, Semicond. Sci. Technol. 20, R19-R27 (2005).
3. M. Katagiri, J. Isoya, S. Koizumi, and H. Kanda, Appl. Phys. Lett. 85, 6365 (2004).
4. C. C. Chen, S. F. Lo, and S. H. Chen, Diam. Relat. Mater. 5, 766 (1996).
5. S. Yamanaka, H. Watanabe, S. Masai, D. Takeuchi, H. Okushi, and K. Kajimura, Jpn. J. Appl. Phys. 37, L1129 (1998).
6. H. Kato, W. Futako, S. Yamasaki, and H. Okushi, Diam. Relat. Mater. 14, 340 (2005).
7. S. Koizumi, T. Teraji, and H. Kanda, Diam. Relat. Mater. 9, 935 (2000).
8. H. Kato, S. Yamasaki, and H. Okushi, phys. stat. sol. 202(11), 2122 (2005).
9. E. Gheeraert, S. Koizumi, T. Teraji, H. Kanda, and M. Nesladek, Diam. Relat. Mater. 9, 948 (2000).
10. K. Nakazawa, K. Tanabe, M. Tachiki, H. Kawarada, and S. Koizumi, Phys. Rev. B 64, 235203 (2001).
11. H. Sternschulte, K. Thonke, R. Sauer, and S. Koizumi, Phys. Rev. B 59, 12924 (1999).
12. R. Sauer, N. Teofilov, K. Thonke, and S. Koizumi, phys. stat. sol. 201(11), 2405 (2004).
13. J. S. Blakemore, Semiconductor Statistics (Pergamon, Oxford, UK, 1962).
14. E. Gheeraert, N. Casanova, S. Koizumi, T. Teraji, and H. Kanda, Diam. Relat. Mater. 10, 44 (2001).