Static-charging mitigation and contamination avoidance by selective carbon coating of TEM samples

Ultramicroscopy

Volumn 106, Issue 11-12 SPEC. ISS., 2006, Pages 981-985

  Höche, Thomas ^a,b   Gerlach, Jürgen W ^a   Petsch, Tino ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b 3D Micromac AG   (Germany)

Author keywords

Avoidance of static charging and contamination; Sample preparation for transmission electron microscopy; Secondary ion mass spectrometry

Indexed keywords

CARBON; CONTAMINATION; DEPOSITION; ELECTRON DIFFRACTION; ELECTRON IRRADIATION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CHARGE-DRAINING LAYER; DRAIN CHARGES; SHAPE-ADOPTED MASK; STATIC-CHARGING MITIGATION;

COATINGS;

CARBON;

ARTICLE; ELECTRON; ELECTRON DIFFRACTION; ELECTRON MICROSCOPE; IMAGE QUALITY; IRRADIATION; TRANSMISSION ELECTRON MICROSCOPY;

EID: 33749251793     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2006.05.007     Document Type: Article

References (6)

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