High speed and low weight micro actuators for high precision assembly applications: Micro actuators with the Micro Harmonic Drive®

IFIP International Federation for Information Processing

Volumn 198, Issue , 2006, Pages 109-117

  Degen, Reinhard ^a   Slatter, Rolf ^a  

^a Micromotion GmbH   (Germany)

Author keywords

Assembly applications; Micro actuator; Micro Harmonic Drive

Indexed keywords

ACTUATORS; AIR; COMPRESSED AIR; COST EFFECTIVENESS; HARMONIC ANALYSIS; LASER BEAMS; MICROACTUATORS; MICROMACHINING; MICROMANIPULATORS; MICROOPTICS; OPTICAL FIBERS;

COST-EFFECTIVE PRODUCTION; DEVELOPMENT HISTORY; ELECTRO-OPTICAL COMPONENTS; HARMONIC DRIVE; HIGH PRECISION ASSEMBLY; MICRO-ASSEMBLY APPLICATIONS; MODIFIED LIGA PROCESS; PRODUCTION EQUIPMENTS;

ASSEMBLY;

EID: 33749162347     PISSN: 15715736     EISSN: None     Source Type: Book Series    
DOI: 10.1007/0-387-31277-3_12     Document Type: Article

References (5)

1. J. Hesselbach, A.Raatz: "mikroPRO -Untersuchung zum internationalen Stand der Mikroproduktionstechnik", Vulkan Verlag, Essen, 2002
2. C. Thürigen, W. Ehrfeld, B. Hagemann, H. Lehr, F. Michel: Development, fabrication and testing of a multi-stage micro gear system. Proc. Of Tribology issues and opportunities in MEMS, pp. 397-402, Columbus (OH), November 1997, Kluwer Academic Publishers, 1998
3. R. Degen, R. Slatter: Hollow shaft micro servo actuators realized with the Micro Harmonic Drive®, Proceedings of Actuator 2002, Bremen
4. S. Kleen, W. Ehrfeld, F. Miche, M. Nienhaus, H.-D. Stölting: Ultraflache Motoren im Pfennigformat, F&M, Jahrg. 108, Heft 4, Carl Hanser Verlag, München, 2000
5. R. Slatter, R. Degen: Micro actuators for precise positionning applications in vacuum, Proceedings of Actuator 2004, Bremen