Real time calibration for ultrasensitive leak detection

Vacuum

Volumn 81, Issue 3, 2006, Pages 257-259

  Chen, Xu ^a   Xiao, Libo ^a   Huang, Tianbin ^a   Shu, Yi ^a   Chen, Ping ^a   Cha, Liangzhen ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Real time calibration; Ultrasensitive leak detection; Variable reference leak rate

Indexed keywords

CALIBRATION; HELIUM; MASS SPECTROMETERS; PLATINUM; REAL TIME SYSTEMS;

HELIUM REFERENCE LEAK RATE; PLATINUM WIRES; REAL TIME CALIBRATION; ULTRASENSITIVE LEAK DETECTION; VARIABLE REFERENCE LEAK RATE;

LEAK DETECTION;

EID: 33749045425     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.074     Document Type: Article

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