A micropower differential charge-balancing switched-capacitor front-end for capacitive microaccelerometers

Proceedings of the 2005 European Conference on Circuit Theory and Design

Volumn 3, Issue , 2005, Pages 421-424

  Kämäräinen, Mika ^a   Saukoski, Mikko ^a   Halonen, Kari ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL SIGNAL PROCESSING; ELECTRIC CURRENTS; ELECTROSTATICS; MULTIPLEXING; OPERATIONAL AMPLIFIERS; SIGNAL TO NOISE RATIO; TRANSFER FUNCTIONS;

CAPACITIVE MICROACCELEROMETERS; CURRENT CONSUMPTION; NONLINEAR ELECTROSTATIC FORCES; PROTOTYPE CHIPS;

ELECTROLYTIC CAPACITORS;

EID: 33749024755     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECCTD.2005.1523150     Document Type: Conference Paper

References (4)

1. T. Lehtonen, J. Thurau, "Monolithic Accelerometer for 3D Measurements", in "Advanced Microsystems for Automotive Applications 2004", J. Valldorf, W. Gessner (eds), pp. 11-22, Springer 2004.
2. T. Mineta, S. Kobayashi, Y. Watanabe, S. Kanauchi, I. Nakagawa, E. Suganurna, M. Esashi, "Three-axis Capacitive Accelerometer With Uniform Axial Sensitivities", Proc. Solid-State Sensors and Actuators Conference and Eurosensors, 1995, vol. 2, pp. 554-557.
3. H. Leuthold, F. Rudolf, "An ASIC for High-Resolution Capacitive Microaccelerometers", Sensors and Actuators A, vol. 21, pp. 278-281, February 1990.
4. H. Alzaher, M. Ismail, "A CMOS Fully Balanced Differential Difference Amplifier and Its Applications", IEEE Trans. Circ. Syst. II, vol. 48, pp. 614-620, June 2001.