Programmatics of large scale production of silicon pore optics for future X-ray telescopes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6266 I, Issue , 2006, Pages

  Kraft, S ^a   Collon, M ^a   Beijersbergen, M W ^a   Bavdaz, M ^b   Lumb, D H ^b   Wallace, K ^b   Peacock, A ^b   Krumrey, M ^c   Lehmann, V ^d  

^a Cosine Research BV ^*  (Netherlands)

^b EUROPEAN SPACE AGENCY   (Netherlands)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^d INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Astronomical telescopes; Pore optics; Silicon; X ray astronomy; X ray optics; XEUS

Indexed keywords

MIRRORS; OPTICAL RESOLVING POWER; OPTIMIZATION; SILICON; SPACE TELESCOPES; X RAY OPTICS;

ASTRONOMICAL TELESCOPES; PORE OPTICS; X-RAY ASTRONOMY; XEUS;

SPACE OPTICS;

EID: 33748998207     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.673267     Document Type: Conference Paper

References (13)

1. 'Silicon Pore Optics: novel lightweight high-resolution X-ray optics developed for XEUS', M. Beijersbergen et al, Proc. of SPIE5488-137, San Diego, 2004
2. 'The XEUS X-ray telescope', M. Bavdaz et al, SPIE Proc. 5900-35, San Diego, 2004
3. Turner, M. J. L.; Bleeker, J. A. M.; Trümper, J.; Hasinger, G.; Inoue, H.; Kunieda, H.; Palumbo, G. G. C.; Peacock, A.; Parmar, A. N.; Bavdaz, M New Century of X-ray Astronomy, ASP Conference Proceedings Vol. 251. Edited by H. Inoue and H. Kunieda. ISBN: 1-58381-091-9. San Francisco: Astronomical Society of the Pacific, 2001., p.230
4. 'Development of modular High-performance Pore Optics for the XEUS x-ray telescope', S. Kraft et al, Proc. of SPIE-5900-53, San Siego, 2005
5. See other papers in this session.
6. Jansen, F. et al. XMM-Newton observatory. Astron. Astrophys. 365, L1-L6, 2001
7. Weisskopf, M. C., Tananbaum, H. D., Van Speybroeck, L. P. & O'Dell, S. L. Chandra X-ray Observatory (CXO): Overview. Proc. SPIE 4012, 2-16, 2000
8. Wolter, H. Ann der Phys 6 Fol Band 10, 1952
9. Steen Weichel, Silicon to silicon wafer bonding for microsystem packaging and formation, PhD, Technical University of Denmark, 2000
10. Goesele et al, Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics, Proc. of SPIE 3151, 1997
11. IA. Proessl, G. Kraeuter, Wafer direct bonding: tailoring adhesion between brittle materials, Materials Science and Engineering, R25, Nos. 1-2, 1999
12. U. Goesele T. Abe, J. Haisma and M.A. Schmidt, Ist Intl. Symp. on Semiconductor wafer bonding: Science, technology, and Applications, Proc. Vol 92-7, the Electrochemical Society Pennington, NJ, 1992
13. M. Krumrey and G. Ulm, High accuracy detector calibration at the PTB four-crystal monochromator beamline, Nucl. Instr. and Meth. A 467-468, 1175-1178, 2001