Primary calibration of the volume of silicon spheres

Measurement Science and Technology

Volumn 17, Issue 10, 2006, Pages 2527-2539

  Nicolaus, R A ^a   Fujii, K ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Density; Phase shifting interferometry; Silicon crystal; Sphere; Volume; Wavelength tuning

Indexed keywords

DENSITY (SPECIFIC GRAVITY); INTERFEROMETERS; INTERFEROMETRY; MEASUREMENT THEORY; PHASE SHIFT; SILICON;

OPTICAL INTERFEROMETRY; PHASE-SHIFTING INTERFEROMETRY; SILICON CRYSTAL; WAVELENGTH TUNING;

SPHERES;

DENSITY (SPECIFIC GRAVITY); INTERFEROMETERS; INTERFEROMETRY; MEASUREMENT THEORY; PHASE SHIFT; SILICON; SPHERES;

EID: 33748987376     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/10/001     Document Type: Conference Paper

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