Evaluation of structural and mechanical properties of aluminum oxide thin films deposited by a sol-gel process: Comparison of microwave to conventional anneal

Journal of Non-Crystalline Solids

Volumn 352, Issue 38-39, 2006, Pages 4093-4100

  Phani, A R ^a   Santucci, S ^a  

^a UNIVERSITY OF L'AQUILA   (Italy)

Author keywords

Atomic force and scanning tunneling microscopy; Hardness; Mechanical properties; Scanning electron microscopy; SEM S100; Sintering; Sol gels (xerogels); Spin coating; X ray diffraction

Indexed keywords

ALUMINUM COMPOUNDS; ANNEALING; FUSED SILICA; IRRADIATION; MICROWAVES; SCANNING ELECTRON MICROSCOPY; SINTERING; SOL-GELS; SPIN COATING; X RAY DIFFRACTION ANALYSIS;

ADHESION STRENGTH; ATOMIC FORCE AND SCANNING TUNNELING MICROSCOPY; DIP COATING; SEM S100;

THIN FILMS;

EID: 33748971918     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.06.013     Document Type: Article

References (13)

1. Wan B., and Lai H. Bioelectromagnetics 21 (2000) 52
2. Lindtrom P., Tierney J., Wathey B., and Westman J. Tetrahedron 57 (2001) 9225
3. Lee W.C., Lui K.S., and Lin I.N. Jpn. J. Appl. Phys 38 (1999) 5500
4. Wang K.L., Zhang Q.B., and Zhu Y.M. Appl. Surf. Sci 174 (2001) 191
5. Shigeng S. Phys. Stat. Sol. A Appl. Res. 164 (1997) 779
6. Phani A.R., and Haefke H. MRS Fall 795 (2003) U12.11.1
7. Baghurst D.R., and Mingos D.M.P. J. Chem. Soc. Chem. Comm. (1998) 829
8. Liu Y.F., Liu X.Q., and Meeng G.Y. Mater. Lett. 48 (2001) 176
9. Baghurst D.R., Chippindale A.M., and Mingos D.M.P. Nature 332 (1988) 311
10. Kimura T., Takizawa H., Uheda K., and Shimada M. J. Am. Ceram. Soc 81 (1998) 2961
11. A.R. Phani, S. Santucci, J. Phys. Condens. Matter, (in press).
12. Kenkre V., Skala L., Weiser M., and Katz J. J. Mater. Sci. 26 (1991) 2483
13. Kriegsmann G. J. Appl. Phy. (1992) 1960