Design optimization for micromachined low power Mach-Zehnder thermo-optic switch

Applied Physics Letters

Volumn 89, Issue 12, 2006, Pages

  Wu, Ching Yi ^a   Lin, Puru ^a   Huang, Ruey Shing ^a   Chao, Wei Chung ^b   Lee, Mark M H ^c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL CENTER FOR HIGH PERFORMANCE COMPUTING   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INTERFEROMETERS; OPTIMIZATION; PHASE SHIFT; SILICON; WAVEGUIDES;

HEATING POWER; OPTIMUM DESIGN; POWER MACH-ZEHNDER THERMO-OPTIC SWITCH; SILICON GROOVE;

MICROMACHINING;

EID: 33748965718     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2354481     Document Type: Article

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