Study of chemical interaction at Al-ZERODUR interface

Journal of the European Ceramic Society

Volumn 26, Issue 16, 2006, Pages 3825-3830

  Berezhinsky, L I ^a   Maslov, V P ^a   Serdega, B K ^a   Tetyorkin, V V ^a   Yukhymchuk, V A ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

Al; Glass ceramics; Joining; Thermal expansion

Indexed keywords

ALUMINUM; CHEMICAL MECHANICAL POLISHING; RAMAN SPECTROSCOPY; RAPID THERMAL ANNEALING; REACTION KINETICS; RESIDUAL STRESSES; SECONDARY ION MASS SPECTROMETRY; THERMAL EXPANSION; X RAY SPECTROSCOPY;

MODULATION-POLARIZATION TECHNIQUE; THIN ALUMINUM FILMS;

GLASS CERAMICS;

ALUMINUM; CHEMICAL MECHANICAL POLISHING; GLASS CERAMICS; RAMAN SPECTROSCOPY; RAPID THERMAL ANNEALING; REACTION KINETICS; RESIDUAL STRESSES; SECONDARY ION MASS SPECTROMETRY; THERMAL EXPANSION; X RAY SPECTROSCOPY;

EID: 33748865556     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2006.01.020     Document Type: Article

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