Fabrication, experiment of a microactuator using magnetic fluid for micropump application

Microsystem Technologies

Volumn 12, Issue 12, 2006, Pages 1085-1091

  Sim, Wonchul ^a   Oh, Jaegeun ^b   Choi, Bumkyoo ^b  

^a Intelligent Microsystem Center   (South Korea)

^b Sogang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC DEVICES; MAGNETIC FIELDS; MAGNETIC FLUIDS; MAGNETIC FLUX; MAGNETIC PROPERTIES; MICROMACHINING;

MAGNETIC FLUX DENSITY; MICROPUMP APPLICATION; PARYLENE DIAPHRAGM;

MICROACTUATORS;

EID: 33748789075     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0130-2     Document Type: Article

References (9)

1. Smiths JG (1990) Piezoelectric micropump with three valves working peristaltically. Sens Actuators A21-A23:203-206
2. Grosjean C, Yang X, Tai YC (1999) Practical thermopneumatic valve, twelfth IEEE international conference on micro electro mechanical systems (MEMS' 99), Jan 17-21, Orlando, pp 147-152
3. Richter AA, Plettner K (1991) A micromachined electrohydrodynamic (EHD) pump. Sens Actuators A29:159-168
4. Pérez-Castillejos R et al (2000) The use of ferrofluid in micromechanics. Sens Actuators 84:176-180
5. Miller CW (1973) Magnetic fluids: magnetic forces and pumping mechanism, NTIS Final Report AD/A-006323, The Sibbley School of Mechanical and Aerospace Engineering, Cornell University, Ithaca
6. Greivell NE et al (1997) The design of ferrofluid magnetic pipette. IEEE Trans Biomed Eng 44:129-135
7. Sim WC et al (2001) Fabrication and experiment of a new microactuator using magnetic fluids. KMEMS, pp 50-55
8. Rosensweig RE (1985) Ferrohydrodynamics. Cambridge University Press, New York
9. Wonchul Sim et al (2001) Test and simulation of a parylene diaphragm, TRANSDUCERS' 01 EUROSENSORS XV, Munich, Germany, pp 1382-1385