CVD growth of cubic boron nitride: A theoretical/experimental approach

Thin Solid Films

Volumn 515, Issue 2 SPEC. ISS., 2006, Pages 401-406

  Larsson, Karin ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

ALD; BN; Diamond; Growth; Quantum chemistry; Surface processes; Theoretical

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; GROWTH (MATERIALS); SURFACE PROPERTIES; THIN FILMS;

ATOMIC LAYER DEPOSITION (ALD); QUANTUM CHEMISTRY; SURFACE PROCESSES; THEORETICAL RESULTS;

CUBIC BORON NITRIDE;

EID: 33748755729     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.220     Document Type: Article

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