New data-processing technique for measurement of metallic foil thickness with differential white-light interferometry

Optics and Lasers in Engineering

Volumn 45, Issue 1, 2007, Pages 240-244

  Du, Yanli ^a,b   Yan, Huimin ^a   Nie, Yongjun ^a   Zhang, Xiuda ^a   Zheng, Minmin ^a  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHENGZHOU UNIVERSITY   (China)

Author keywords

Differential white light interferometry; Extremum method; Least root mean square deviation; Metallic foil

Indexed keywords

DATA PROCESSING; INTERFEROMETRY; LEAST SQUARES APPROXIMATIONS; LIGHT INTERFERENCE; LIGHT REFLECTION; THICKNESS MEASUREMENT;

DIFFERENTIAL WHITE-LIGHT INTERFEROMETRY; EXTREMUM METHOD; LEAST ROOT-MEAN-SQUARE DEVIATION; TANDEM MICHELSON INTERFEROMETERS (MI);

METAL FOIL;

EID: 33748752313     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2006.03.007     Document Type: Article

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