Hybrid numerical - Experimental moire technique for analysis of microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6345, Issue , 2006, Pages

  Saunoriene, L ^a   Ragulskis, M ^a   Palevicius, A ^a   Ostasevicius, V ^a   Janusas, G ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Mathematical modeling; MEMS; Optical moir method

Indexed keywords

BENDING (DEFORMATION); EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; IMAGE ANALYSIS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NUMERICAL ANALYSIS;

ANGULAR SMOOTHING; ISOLINES; OPTICAL MOIRÉ METHOD;

MICROSTRUCTURE;

EID: 33748695368     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.693150     Document Type: Conference Paper

References (6)

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6. O.C. Zienkiewicz, and K. Morgan, Finite elements and approximation, Mir, Moscow, 1986.