New thermally isolated pixel structure for high-resolution (640 × 480) uncooled infrared focal plane arrays

Optical Engineering

Volumn 45, Issue 1, 2006, Pages

  Tohyama, Shigeru ^a   Miyoshi, Masaru ^a   Kurashina, Seiji ^a   Ito, Nobukazu ^a   Sasaki, Tokuhito ^a   Ajisawa, Akira ^a   Tanaka, Yutaka ^a   Kawahara, Akihiro ^b   Iida, Kiyoshi ^a   Oda, Naoki ^a  

^a NEC CORPORATION   (Japan)

^b RENESAS TECHNOLOGY CORP   (Japan)

Author keywords

Bolometer; Fill factor; Focal plane array; High resolution; Infrared; Responsivity; Thermal isolation; Uncooled

Indexed keywords

INTEGRATED OPTICS; LIGHT; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY;

FOCAL PLANE ARRAYS; HIGH-RESOLUTION UNCOOLED INFRARED ARRAYS; NOISE EQUIVALENT TEMPERATURE DIFFERENCE (NETD); THERMAL TIME CONSTANT; THERMALLY ISOLATED PIXEL STRUCTURE;

INFRARED DEVICES;

EID: 33748629965     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2151892     Document Type: Article

References (5)

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