Direct, parallel nanopatterning of silicon carbide by laser nanosphere lithography

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Battula, Arvind ^a   Theppakuttai, Senthil ^a   Chen, Shaochen ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Laser; Nanofabrication; Near field enhancement; Silicon carbide

Indexed keywords

LASER NANOSPHERE LITHOGRAPHY; NANOPATTERNING; NEAR FIELD ENHANCEMENT; SILICON CARBIDE SUBSTRATE;

ATOMIC FORCE MICROSCOPY; IRRADIATION; LASER BEAMS; LITHOGRAPHY; MONOLAYERS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY;

SILICON CARBIDE;

EID: 33748602927     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2177288     Document Type: Article

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