Laser acoustic imaging of Film Bulk Acoustic Resonator (FBAR) lateral mode dispersion

AIP Conference Proceedings

Volumn 760, Issue , 2005, Pages 251-256

  Telschow, Ken L ^a  

^a IDAHO NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33748558417     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1916685     Document Type: Conference Paper

References (11)

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2. Telschow, K. L. Deason, V. A. Cottle, D. L. and Larson III, J. D., "UHF Acoustic Microscopic Imaging of Resonator Motion" in 2000 IEEE Ultrasonics Symposium Proceedings, Vol. 1, S. C. Schneider, M. Levy, B. R. McAvoy eds., IEEE, Piscataway, NJ. 631-634 (2000).
3. Telschow, K. L. Deason, V. A. Cottle, D. L. and Larson III, J. D., "Full-Field Imaging of GHz Film Bulk Acoustic Resonator Motion," IEEE Trans. Ulrason., Ferroelect, Freq. Contr. 50 (10), 1279-1285 (2003).
4. Telschow, K. L., Deason, V. A., Schley, R. S., Watson, S. M., and "Direct Imaging of Lamb Waves in Plates using Photorefractive Dynamic Holography," J. Acoust. Soc. Am. 106 (5), 2578-2587 (1999).
5. FBAR resonators and electrical characterization were provided by John D. Larson III, Device Technologies Division, Agilent Technologies Inc., Palo Alto, CA.
6. Auld, B. A., Acoustic Fields and Waves in Solids (R.E. Krieger, Malabar, FL., (1990), Vol. 1, 396-398.
7. Pensala, T., Makkonen, T., Vartiainen, J., Knuutila. J., Kaitila, J., Holmgren, O. and Salomaa, M. M., "Laser Interferometric Measurement of Lamb Wave Dispersion and Extraction of Material Parameters in FBARs," in 2002 IEEE Ultrasonics Symposium Proceedings, Vol. 1, S. C. Schneider, D. E. Yuhas eds., IEEE, Piscataway, NJ. 977-980 (2002).
8. Mukdadi, O., Datta, S. K., Telschow, K. L., and Deason, V. A., "Ultrasonic Guided Waves in Thin Orthotropic Layers: Theoretical Analysis and Dynamic Holographic Imaging Measurement," IEEE Trans. Ultrason., Ferroelect., Freq. Contr. 48 (6) 1581-1593 (2001).
9. Tsubouchi, K., & Mikishiba, N., "Zero-Temperture-Coefficient SAW Devices on AIN Epitaxial Films," IEEE Trans. Sonics Ultr. SU-32 (5), 634-644 (1985).
10. Dickinson, J. M. and Armstrong, P. E., J. Appl. Phys. 38, 602-606 (1967).
11. Mukdadi, O. M., Desai, Y. M., Datta, S. K., Shah, A. H. and Niklasson, A. J., "Elastic guided waves in a layered plate with rectangular cross section," J. Acoust, Soc. Am 112 (5), 1766-1779 (2002).