Design of a vapor transport deposition process for thin film materials

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 5, 2006, Pages 1695-1701

  Hanket, G M ^a   McCandless, B E ^a   Buchanan, W A ^a   Fields, S ^a   Birkmire, R W ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTOVOLTAIC CONVERSION; PROCESS GEOMETRY; THIN FILM MATERIALS; VAPOR TRANSPORT DEPOSITION;

COMPOSITION; FILM GROWTH; SUPERSATURATION; TEMPERATURE DISTRIBUTION; THIN FILMS; VAPOR DEPOSITION;

METALLIC FILMS;

EID: 33748555583     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2214689     Document Type: Article

References (12)

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11. SIMS analysis carried out by S. Asher (private communication).
12. B. E. McCandless, W. A. Buchanan, R. W. Birkmire, Proceedings of the 31st IEEE PVSC (2005), p. 295.