Spatial resolution of a wavelength-dispersive electron probe microanalyzer equipped with a thermal field emission gun

Microchimica Acta

Volumn 155, Issue 1-2, 2006, Pages 175-178

  Kimura, Takashi ^a   Nishida, Kenji ^a   Tanuma, Shigeo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Electron probe microanalyzer; Field emission electron gun; Wavelength dispersive spectrometer

Indexed keywords

EID: 33748519907     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-006-0538-5     Document Type: Conference Paper

References (6)

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