Investigation of micromechanical cantilever sensors with microfocus grazing incidence small-angle x-ray scattering

Applied Physics Letters

Volumn 89, Issue 5, 2006, Pages

  Wolkenhauer, Markus ^a   Bumbu, Gina Gabriela ^a   Cheng, Yajun ^a   Roth, Stephan V ^b   Gutmann, Jochen S ^a,c  

^a MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

^b DESY   (Germany)

^c JOHANNES GUTENBERG UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; COMPOSITE MICROMECHANICS; SENSITIVITY ANALYSIS; X RAY SCATTERING;

COATING QUALITY; CRITICAL PARAMETERS; MICROMECHANICAL CANTILEVER ARRAYS; SENSOR SENSITIVITY;

SENSORS;

EID: 33748465385     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2245310     Document Type: Article

References (8)

1. L. A. Pinnaduwage, H. F. Ji, and T. Thundat, IEEE Sens. J. 5, 774 (2005).
2. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, Rev. Sci. Instrum. 75, 2229 (2004).
3. H. P. Lang, M. Hegner, E. Meyer, and Ch. Gerber, Nanotechnology 13, R29 (2002).
4. G. G. Bumbu, G. Kircher, M. Wolkenhauer, R. Berger, and J. S. Gutmann, Macromol. Chem. Phys. 205, 1713 (2004).
5. G. G. Bumbu, G. Kircher, M. Wolkenhauer, R. Berger, and J. S. Gutmann, Langmuir (submitted).
6. H. P. Lang, M. Hegner, and Ch. Gerber, Mater. Today 8, 30 (2005).
7. S. V. Roth, M. Burghammer, C. Riekel, P. Müller-Buschbaum, A. Dietheit, P. Panagiotou, and H. Walter, Appl. Phys. Lett. 82, 1935 (2003).
8. G. H. Vineyard, Phys. Rev. B 26, 4146 (1982).