Nanohandling automation within a scanning electron microscope

IEEE International Symposium on Industrial Electronics

Volumn III, Issue , 2005, Pages 1073-1078

  Wich, T ^a   Sievers, T ^a   Jahnisch M ^a   Hulsen H ^a   Fatikow, S ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; ELECTRONICS INDUSTRY; NETWORK COMPONENTS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

AUTOMATED HANDLING; LAMELLA HANDLING; MICROPARTS; SEMICONDUCTOR INDUSTRY;

AUTOMATION;

EID: 33748347078     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISIE.2005.1529072     Document Type: Conference Paper

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