Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1798-1804

  Lin, Chun Hung ^a   Chen, Hsuen Li ^b   Chao, Wen Chi ^a   Hsieh, Chung I ^a   Chang, Wen Huei ^c  

^a NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c CHUNG SHAN MEDICAL UNIVERSITY   (Taiwan)

Author keywords

Ellipsometry; Photonic crystal; Rigorous coupled wave analysis

Indexed keywords

CRYSTAL LATTICES; CRYSTAL STRUCTURE; ELECTRON BEAM LITHOGRAPHY; ELLIPSOMETRY; ENERGY GAP; REFLECTOMETERS; SILICON; SPECTROSCOPIC ANALYSIS; WAVE EFFECTS;

PHOTONIC BANDGAP; PHOTONIC CRYSTALS; RIGOROUS COUPLED WAVE ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY;

CRYSTALS;

EID: 33748261257     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.135     Document Type: Article

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