X-ray vortices with high topological charge

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1360-1363

  Cojoc, D ^a   Kaulich, B ^b   Carpentiero, A ^a   Cabrini, S ^a   Businaro, L ^a   Di Fabrizio, E ^a,c  

^a LABORATORIO TASC   (Italy)

^b SINCROTRONE TRIESTE   (Italy)

^c University of Magna Graecia   (Italy)

Author keywords

Diffractive optical elements; Optical vortices; X ray microscopy

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ELECTROPLATING; GOLD; OPTICAL DEVICES; SILICON NITRIDE; X RAY ANALYSIS;

DIFFRACTIVE OPTICAL ELEMENTS; OPTICAL VORTICES; TOPOLOGICAL CHARGE; X RAY MICROSCOPY;

DIFFRACTIVE OPTICS;

EID: 33748260447     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.066     Document Type: Article

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