An automated meniscus coating system for polymer deposition on large-area mcm-d and mcm-l substrates

IEEE Transactions on Electronics Packaging Manufacturing

Volumn 23, Issue 4, 2000, Pages 236-

  Bhattacharya, Swapan K ^a   Bhatevara, Sachin ^a   Morales, Hector ^a   Kauffman, Sherlon ^a   Kamen, Edward ^a   May, Gary ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

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EID: 33747996792     PISSN: 1521334X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TEPM.2000.895056     Document Type: Article

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