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Volumn 179, Issue 1-3, 2006, Pages 111-116

Influence of cutting conditions scaling in the machining of semiconductors crystals with single point diamond tool

Author keywords

Brittle to ductile response; Diamond turning; Semiconductors crystals

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; DIAMOND CUTTING TOOLS; MICROSTRUCTURE; PHASE TRANSITIONS; TURNING;

EID: 33747890447     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2006.03.106     Document Type: Article
Times cited : (10)

References (10)
  • 1
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    • Gridneva, I.V.1    Milman, Y.V.2    Trefilov, M.3
  • 4
    • 11944253890 scopus 로고
    • Stress-induced amorphization of a silicon crystal by mechanical scratching
    • Minowa K., and Sumino K. Stress-induced amorphization of a silicon crystal by mechanical scratching. Phys. Rev. Lett. 69 2 (1992) 320-322
    • (1992) Phys. Rev. Lett. , vol.69 , Issue.2 , pp. 320-322
    • Minowa, K.1    Sumino, K.2
  • 5
    • 0034256170 scopus 로고    scopus 로고
    • Brittle to ductile transition dependence upon the transition pressure value of semiconductors in micromachining
    • Jasinevicius R.G., Pizani P.S., and Duduch J.G. Brittle to ductile transition dependence upon the transition pressure value of semiconductors in micromachining. J. Mater. Res. 15 8 (2000) 1688-1692
    • (2000) J. Mater. Res. , vol.15 , Issue.8 , pp. 1688-1692
    • Jasinevicius, R.G.1    Pizani, P.S.2    Duduch, J.G.3
  • 6
    • 21344480737 scopus 로고
    • Transmission electron microscopy of nanomachined of silicon crystals
    • Puttick K.E., Whitmore L.C., Gee A.E., and Chao C.L. Transmission electron microscopy of nanomachined of silicon crystals. Phil. Mag. A 69 (1994) 91-103
    • (1994) Phil. Mag. A , vol.69 , pp. 91-103
    • Puttick, K.E.1    Whitmore, L.C.2    Gee, A.E.3    Chao, C.L.4
  • 7
    • 0030127076 scopus 로고    scopus 로고
    • Ductile-regime turning mechanism of single crystal Si
    • Shibata T., Fujii S., Makino E., and Ikeda M. Ductile-regime turning mechanism of single crystal Si. Prec. Eng. 18 2/3 (1996) 129-137
    • (1996) Prec. Eng. , vol.18 , Issue.2-3 , pp. 129-137
    • Shibata, T.1    Fujii, S.2    Makino, E.3    Ikeda, M.4
  • 9
    • 0019658428 scopus 로고    scopus 로고
    • A.G. Evans, D.B. Marshall, Wear mechanisms in ceramics, in: D.A. Rigney (Ed.), Fundamentals of Friction and Wear, American Society for Metals, Metal Park, OH, 1981, p. 439.
  • 10
    • 0024063725 scopus 로고
    • Contact damage in single crystal silicon investigated by cross sectional transmission electron microscopy
    • Johansson S., and Shweitz J.-A. Contact damage in single crystal silicon investigated by cross sectional transmission electron microscopy. J. Am. Ceram. Soc. 71 8 (1988) 617-623
    • (1988) J. Am. Ceram. Soc. , vol.71 , Issue.8 , pp. 617-623
    • Johansson, S.1    Shweitz, J.-A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.