메뉴 건너뛰기




Volumn E89-C, Issue 7, 2006, Pages 906-912

Review of recent developments in growth of AlGaN/GaN high-electron mobility transistors on 4H-SiC by plasma-assisted molecular beam epitaxy

Author keywords

Gallium Nitride; HEMT; MBE; Microwave

Indexed keywords

GALLIUM NITRIDE; MOLECULAR BEAM EPITAXY; NUCLEATION; PLASMA APPLICATIONS; SEMICONDUCTING GALLIUM COMPOUNDS; SILICON CARBIDE;

EID: 33747876949     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e89-c.7.906     Document Type: Conference Paper
Times cited : (16)

References (24)
  • 5
    • 0038476602 scopus 로고    scopus 로고
    • Unpassivated AlGaN-GaN HEMTs with minimal RF dispersion grown by plasma-assisted MBE on semi-insulating 6H-SiC substrates
    • N.G. Weimann, M.J. Manfra, and R. Wachtier, "Unpassivated AlGaN-GaN HEMTs with minimal RF dispersion grown by plasma-assisted MBE on semi-insulating 6H-SiC substrates," IEEE Electron Device Lett., vol.24, no.2, pp.57-59, 2003.
    • (2003) IEEE Electron Device Lett. , vol.24 , Issue.2 , pp. 57-59
    • Weimann, N.G.1    Manfra, M.J.2    Wachtier, R.3
  • 7
    • 79956052684 scopus 로고    scopus 로고
    • Growth of Fe doped semi-insulating GaN by metalorganic chemical vapor deposition
    • S. Heikman, S. Keller, S.P. DenBaars, and U.K. Mishra, "Growth of Fe doped semi-insulating GaN by metalorganic chemical vapor deposition," Appl. Phys. Lett., vol.81, no.3, pp.439-441, 2002.
    • (2002) Appl. Phys. Lett. , vol.81 , Issue.3 , pp. 439-441
    • Heikman, S.1    Keller, S.2    Denbaars, S.P.3    Mishra, U.K.4
  • 9
    • 0000789654 scopus 로고    scopus 로고
    • Semi-insulating C-doped GaN and high-mobility AlGaN/GaN heterostructures grown by ammonia molecular beam epitaxy
    • J.B. Webb, H. Tang, S. Rolfe, and J.A. Bardwell, "Semi-insulating C-doped GaN and high-mobility AlGaN/GaN heterostructures grown by ammonia molecular beam epitaxy," Appl. Phys. Lett., vol.75, no.7, pp.953-955, 1999.
    • (1999) Appl. Phys. Lett. , vol.75 , Issue.7 , pp. 953-955
    • Webb, J.B.1    Tang, H.2    Rolfe, S.3    Bardwell, J.A.4
  • 10
    • 3142567283 scopus 로고    scopus 로고
    • Carbon doping of GaN with CBr4 in radio-frequency plasma-assisted molecular beam epitaxy
    • D.S. Green, U.K. Mishra, and J.S. Speck, "Carbon doping of GaN with CBr4 in radio-frequency plasma-assisted molecular beam epitaxy," J. Appl. Phys., vol.95, no.12, pp.8456-8462, 2004.
    • (2004) J. Appl. Phys. , vol.95 , Issue.12 , pp. 8456-8462
    • Green, D.S.1    Mishra, U.K.2    Speck, J.S.3
  • 12
    • 3242723280 scopus 로고    scopus 로고
    • Effect of carbon doping on buffer leakage in AlGaN/GaN high electron mobility transistors
    • C. Poblenz, P. Waltereit, S. Rajan, S. Heikman, U.K. Mishra, and J.S. Speck, "Effect of carbon doping on buffer leakage in AlGaN/GaN high electron mobility transistors," J. Vac. Sci. Technol. B, vol.22, no.3, pp.1145-1149, 2004.
    • (2004) J. Vac. Sci. Technol. B , vol.22 , Issue.3 , pp. 1145-1149
    • Poblenz, C.1    Waltereit, P.2    Rajan, S.3    Heikman, S.4    Mishra, U.K.5    Speck, J.S.6
  • 13
    • 0035914883 scopus 로고    scopus 로고
    • Current collapse and the role of carbon in AlGaN/GaN high electron mobility transistors grown by metalorganic vapor-phase epitaxy
    • P.B. Klein, S.C. Binari, K. Ikossi, A.E. Wickenden, D.D. Koleske, and R.L. Henry, "Current collapse and the role of carbon in AlGaN/GaN high electron mobility transistors grown by metalorganic vapor-phase epitaxy," Appl. Phys. Lett., vol.79, no.21, pp.3527-3529, 2001.
    • (2001) Appl. Phys. Lett. , vol.79 , Issue.21 , pp. 3527-3529
    • Klein, P.B.1    Binari, S.C.2    Ikossi, K.3    Wickenden, A.E.4    Koleske, D.D.5    Henry, R.L.6
  • 14
    • 31144456592 scopus 로고    scopus 로고
    • Effect of AlN nucleation layer growth conditions on buffer leakage in AlGaN/GaN high electron mobility transistors grown by molecular beam epitaxy (MBE)
    • C. Poblenz, P. Waltereit, S. Rajan, U.K. Mishra, J.S. Speck, P. Chin, I. Smorchkova, and B. Keying, "Effect of AlN nucleation layer growth conditions on buffer leakage in AlGaN/GaN high electron mobility transistors grown by molecular beam epitaxy (MBE)," J. Vac. Sci. Technol. B, vol.23, no.4, pp.1562-1567, 2005.
    • (2005) J. Vac. Sci. Technol. B , vol.23 , Issue.4 , pp. 1562-1567
    • Poblenz, C.1    Waltereit, P.2    Rajan, S.3    Mishra, U.K.4    Speck, J.S.5    Chin, P.6    Smorchkova, I.7    Keying, B.8
  • 15
    • 0011796924 scopus 로고    scopus 로고
    • Control of GaN surface morphologies using plasma-assisted molecular beam epitaxy
    • B. Keying, R. Averbeck, L.F. Chen, E. Haus, H. Riechert, and J.S. Speck, "Control of GaN surface morphologies using plasma-assisted molecular beam epitaxy," J. Appl. Phys., vol.88, no.4, pp. 1855-1860, 2000.
    • (2000) J. Appl. Phys. , vol.88 , Issue.4 , pp. 1855-1860
    • Keying, B.1    Averbeck, R.2    Chen, L.F.3    Haus, E.4    Riechert, H.5    Speck, J.S.6
  • 16
    • 31144466211 scopus 로고    scopus 로고
    • Uniformity and control of surface morphology during growth of GaN by molecular beam epitaxy
    • C. Poblenz, P. Waltereit, and J.S. Speck, "Uniformity and control of surface morphology during growth of GaN by molecular beam epitaxy," J. Vac. Sci. Technol. B, vol.23, no.4, pp.1379-1385, 2005.
    • (2005) J. Vac. Sci. Technol. B , vol.23 , Issue.4 , pp. 1379-1385
    • Poblenz, C.1    Waltereit, P.2    Speck, J.S.3
  • 17
    • 0023164259 scopus 로고
    • Wettability of SiC by Aluminium and Al-Si alloys
    • V. Laurent, D. Chatain, and N. Eustathopoulos, "Wettability of SiC by Aluminium and Al-Si alloys," J. Mater. Sci., vol.22, no.1, pp.244-250, 1987.
    • (1987) J. Mater. Sci. , vol.22 , Issue.1 , pp. 244-250
    • Laurent, V.1    Chatain, D.2    Eustathopoulos, N.3
  • 18
    • 85027121984 scopus 로고    scopus 로고
    • Charles Evans and Associates, Sunnyvale, CA (private communication)
    • Charles Evans and Associates, Sunnyvale, CA (private communication).
  • 19
    • 12844286067 scopus 로고    scopus 로고
    • Structural properties of GaN buffer layers on 4H-SiC(0001) grown by plasma-assisted molecular beam epitaxy for high electron mobility transistors
    • P. Waltereit, C. Poblenz, S. Rajan, F. Wu, U.K. Mishra, and J.S. Speck, "Structural properties of GaN buffer layers on 4H-SiC(0001) grown by plasma-assisted molecular beam epitaxy for high electron mobility transistors," Jpn. J. Appl. Phys., 2, Lett., vol.43, no.12A, pp.L1520-L1523, 2004.
    • (2004) Jpn. J. Appl. Phys., 2, Lett. , vol.43 , Issue.12 A
    • Waltereit, P.1    Poblenz, C.2    Rajan, S.3    Wu, F.4    Mishra, U.K.5    Speck, J.S.6
  • 20
    • 1442288216 scopus 로고    scopus 로고
    • Direct observation of different equilibrium Ga adlayer coverages and their desorption kinetics on GaN (0001) and (000(1)over-bar) surfaces
    • G. Koblmuller, R. Averbeck, H. Riechert, and P. Pongratz, "Direct observation of different equilibrium Ga adlayer coverages and their desorption kinetics on GaN (0001) and (000(1)over-bar) surfaces," Phys. Rev. B, vol.69, no.3, 035325-1, 2004.
    • (2004) Phys. Rev. B , vol.69 , Issue.3 , pp. 35325-35331
    • Koblmuller, G.1    Averbeck, R.2    Riechert, H.3    Pongratz, P.4
  • 21
    • 0037098087 scopus 로고    scopus 로고
    • Dynamically stable gallium surface coverages during plasma-assisted molecular-beam epitaxy of (0001) GaN
    • C. Adelmann, J. Brault, D. Jalabert, P. Gentile, H. Mariette, G. Mula, and B. Daudin, "Dynamically stable gallium surface coverages during plasma-assisted molecular-beam epitaxy of (0001) GaN," J. Appl. Phys., vol.91, no.12, pp.9638-9645, 2002.
    • (2002) J. Appl. Phys. , vol.91 , Issue.12 , pp. 9638-9645
    • Adelmann, C.1    Brault, J.2    Jalabert, D.3    Gentile, P.4    Mariette, H.5    Mula, G.6    Daudin, B.7
  • 22
    • 0029755411 scopus 로고    scopus 로고
    • Role of threading dislocation structure on the x-ray diffraction peak width in epitaxial GaN films
    • B. Heying, X.H. Wu, S. Keller, Y. Li, D. Kapolnek, B.P. Keller, S.P. DenBaars, and J.S. Speck, "Role of threading dislocation structure on the x-ray diffraction peak width in epitaxial GaN films," Appl. Phys. Lett., vol.68, no.5, pp.643-645, 1996.
    • (1996) Appl. Phys. Lett. , vol.68 , Issue.5 , pp. 643-645
    • Heying, B.1    Wu, X.H.2    Keller, S.3    Li, Y.4    Kapolnek, D.5    Keller, B.P.6    Denbaars, S.P.7    Speck, J.S.8
  • 23
    • 79956003090 scopus 로고    scopus 로고
    • Dislocation and morphology control during molecular-beam epitaxy of AlGaN/GaN heterostructures directly on sapphire substrates
    • M.J. Manfra, N.G. Weimann, J.W.P. Hsu, L.N. Pfeiffer, K.W. West, and S.N.G. Chu, "Dislocation and morphology control during molecular-beam epitaxy of AlGaN/GaN heterostructures directly on sapphire substrates," Appl. Phys. Lett., vol.81, no.8, pp.1456-1458, 2002.
    • (2002) Appl. Phys. Lett. , vol.81 , Issue.8 , pp. 1456-1458
    • Manfra, M.J.1    Weimann, N.G.2    Hsu, J.W.P.3    Pfeiffer, L.N.4    West, K.W.5    Chu, S.N.G.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.