High-Ta superconducting antenna-coupled microbolometer on silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2159, Issue , 1994, Pages 98-109

  Rice, J P ^a   Grossman, E N ^a   Borcherdt, L J ^a   Rudman, D A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; BARIUM COMPOUNDS; BOLOMETERS; BUFFER LAYERS; COPPER COMPOUNDS; HIGH TEMPERATURE SUPERCONDUCTORS; SILICON; SPECIFIC HEAT; SUPERCONDUCTING DEVICES; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY; YTTRIA STABILIZED ZIRCONIA; YTTRIUM BARIUM COPPER OXIDES; ZIRCONIA;

ANTENNA-COUPLED; ELECTRICAL NOISE; MICRO-BOLOMETERS; MICROBOLOMETER; NOISE EQUIVALENT POWER; OPERATING TEMPERATURE; THERMAL CONDUCTANCE; YTTRIA-STABILIZED ZIRCONIAS (YSZ);

TANTALUM COMPOUNDS;

EID: 33747677755     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.176135     Document Type: Conference Paper

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