Influence of exposure spectra on optical properties of alicyclic methacrylate copolymer waveguides fabricated by deep UV exposure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 8 B, 2006, Pages 6654-6657

  Ichihashi, Yasuhisa ^a   Henzi, Patric ^a   Bruendel, Mathias ^a   Rabus, Dominik Gerhard ^a   Mohr, Juergen ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Alicyclic methacrylate copolymer; Deep UV exposure; PMMA; Polymer waveguide; Refractive index; Single mode waveguide

Indexed keywords

COPOLYMERS; LIGHT PROPAGATION; OPTIMAL CONTROL SYSTEMS; POLYMETHYL METHACRYLATES; REFRACTIVE INDEX; ULTRAVIOLET RADIATION;

ALICYCLIC METHACRYLATE COPOLYMERS; DEEP UV EXPOSURE; POLYMER WAVEGUIDES; SINGLE-MODE WAVEGUIDES;

OPTICAL WAVEGUIDES;

EID: 33747646242     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.6654     Document Type: Review

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