Increasing oxygen flux through a dense oxygen permeable membrane by photolithographic patterning of platinum

Journal of Membrane Science

Volumn 277, Issue 1-2, 2006, Pages 94-98

  Murphy, Sean M ^a   Slade, David A ^a   Nordheden, Karen J ^a   Stagg Williams, Susan M ^a  

^a University of Kansas   (United States)

Author keywords

Ionic conductor; Lithography; Membrane; Oxygen flux; Physical vapor deposition (PVD)

Indexed keywords

CATALYSTS; INDUSTRIAL APPLICATIONS; MEMBRANES; PHOTOLITHOGRAPHY; PHYSICAL VAPOR DEPOSITION; PLATINUM;

IONIC CONDUCTORS; MIXED METAL OXIDE MEMBRANES; OXYGEN FLUX;

OXYGEN PERMEABLE MEMBRANES;

METAL OXIDE; PLATINUM;

CATALYSTS; INDUSTRIAL APPLICATIONS; MEMBRANES; OXYGEN PERMEABLE MEMBRANES; PHOTOLITHOGRAPHY; PHYSICAL VAPOR DEPOSITION; PLATINUM;

ANALYTIC METHOD; ARTICLE; CATALYST; EVAPORATION; MEMBRANE PERMEABILITY; PRIORITY JOURNAL; REPRODUCIBILITY; SCANNING ELECTRON MICROSCOPY; STONE FORMATION; TEMPERATURE; X RAY ANALYSIS;

EID: 33747585580     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.memsci.2005.10.015     Document Type: Article

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