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Volumn 42, Issue 5, 1983, Pages 460-462
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Production of large-area single-crystal wafers of cubic SiC for semiconductor devices
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 33747502586
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.93970 Document Type: Article |
Times cited : (852)
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References (12)
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