Bi-material microcantilever array room-temperature IR imaging

Wuli Xuebao/Acta Physica Sinica

Volumn 55, Issue 7, 2006, Pages 3208-3214

  Miao, Zheng Yu ^a   Zhang, Qing Chuan ^a   Chen, Da Peng ^b   Wu, Xiao Ping ^a   Li, Chao Bo ^b   Guo, Zhe Ying ^a   Dong, Feng Liang ^a   Xiong, Zhi Ming ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

Bi material microcantilever array; Optical readout; Uncooled infrared imaging

Indexed keywords

EID: 33747454931     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)