Planar brushless magnetic micromotors

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 1001-1014

  Achotte, Nicolas ^a   Gilles, P A ^a,b   Cugat, Orphée ^a   Delamare, Jérôme ^a   Gaud, P ^c   Dieppedale, C ^c  

^a LABORATOIRE D ELECTROTECHNIQUE DE GRENOBLE   (France)

^b ARTS ET MÉTIERS PARISTECH   (France)

^c CEA LETI   (France)

Author keywords

High speed; MAGMAS; Magnetism; Micromotors; POWER MEMS

Indexed keywords

ELECTRIC MOTORS; ETCHING; LITHOGRAPHY; MICROMACHINING; SEMICONDUCTING SILICON; STATORS;

MAGNETIC MICROMOTORS; MICROGENERATORS; PLANAR MICROMOTORS; STATOR COILS;

MICROELECTROMECHANICAL DEVICES;

EID: 33747426973     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.872232     Document Type: Article

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